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  The following papers are available in PDF format:  Introduction to Shape Memory Alloys Vacuum Deposited TiNi Shape Memory Film Sputter-Deposited SMA Thin Films: Properties and Applications Nitinol Thin Film Three-Dimensional Devices - Fabrication And Applications State-of-the-Art of Shape Memory Actuators Silicon Oxide Diaphragm Valves And Pumps With Tini Thin Film Actuation
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